China AI ObservatoryResearch roleprimary
Precision optics relevant to domestic lithography
As of 2026-09-11CIOMP / CAS · Institute research (source)Reuters · China’s EUV prototype program (source)Company dossier · Reviewed 2026-09-13
CIOMP 长春光机所
CAS institute working on precision optics and related research.
What the evidence says
Research capability and production-ready projection optics remain different stages.
CIOMP / CAS · Institute research (source)Reuters · China’s EUV prototype program (source)Critical facts
Company news
Timeline →reported
EUV prototype reported, with chip production still ahead
Reuters reports a light-generating prototype in a national research effort.
Why it matters. Track working wafers, then production throughput and reliability.
Reuters · China’s EUV prototype program (source)