China AI ObservatoryPublic evidencevendor
Commercial lithography portfolio; advanced immersion qualification remains the key test
As of 2026-09-11Reuters · Initial domestic immersion DUV production (source)SMEE · Lithography equipment portfolio (source)Company dossier · Reviewed 2026-09-18
SMEE 上海微电子
Domestic lithography equipment company.
What the evidence says
Older public product listings do not define the ceiling of all Chinese lithography efforts.
Reuters · Initial domestic immersion DUV production (source)SMEE · Lithography equipment portfolio (source)Critical facts
Company news
Timeline →reported
Initial domestic immersion DUV tools enter production
Reuters identifies Aishengna as the production coordinator.
Why it matters. Machine output alone does not establish high-volume wafer production.
Reuters · Initial domestic immersion DUV production (source)